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Semilab, a leading supplier of epitaxial layer characterization products announces the next generation of its well-known and widely used automatic Spreading Resistance Profiler (SRP) system. The new SRP-2100 will replace SRP-2000 from Q1, 2014. The SRP-2100 system offers wider measurement range, improved precision and repeatability, smaller footprint, and a new software with easy-to-use interface. For further information, contact your local Semilab office.
GLOBALFOUNDRIES U.S. Inc. and Semilab are to present a joint research talk during the AVS 60th International Symposium & Exhibition on 31 October, 2013, about recent results obtained with Semilab’s novel ellipsometer porosimeter PS-2000 being capable of extracting thermal expansion coefficients of thin ULK coatings. The abstract of the talk is available in the conference abstract booklet on page 203, and can also be read below.
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The University of Arizona, the University of Central Florida and Semilab published a joint research paper in the latest issue of Optics Letters. The paper covers a new application of a spectroscopic ellipsometer to characterize nanorod structures. The procedure includes measurements with an ellipsometer, then applying a novel optical modelling and calculation method to obtain information on the optical constants and plasmonic response of the structure.
The paper can be found online: Optics Letters, Vol. 38, Issue 19, pp. 3969-3972 (2013)
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As part of its ongoing commitment to partner with its major semiconductor problems on metrology solutions Semilab is pleased to announce the availability of its next generation small spot μSE series of products. The μSE spectroscopic ellipsometer systems are available in two configurations allowing measurement on scribe line tests structures on product wafers. Utilizing a high brightness small spot source along with an extended wavelength range and increased angle of incidence; these systems are optimized for thin film measurements including SiGe and poly-silicon structures. The first systems were shipped and accepted in 2012 so the tools have a proven track record.
μSE systems are available in a number of platforms from the cost effective 2200 series (for 200 mm and below) through to the new 5000 series which are optimized for measurements on 450 mm wafers. Platforms are available for manual, semi-automatics and fully automatic measurements modes allowing the systems to be used for R&D in initial product development through to fully automatic OHT production lines.
Semilab is a major producer of measurements tools for the semiconductor, photo-voltaic and R&D industries. The company produces a wide range of systems including contact electrical (mercury probe, SRP, 4pt probe, LBIC, elastic metal contact CV), non-contact electrical (microwave PCD, Surface Photovoltage, Airgap CV systems) and optical systems (light-scattering tomography, photoluminescence, laser ellipsometer, spectroscopic ellipsometer, model-based infrared reflectometer).
Semilab acknowledges support by the European Union and the Hungarian National Development Agency for this project.
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