Epi Layer Resistivity

Epi Layer Resistivity

• ACV-3000

Deep Level Transient Spectroscopy

• DLS-1000
• DLS-83D

• ECV-3000
• FAaST 300-SL
• FAaST COCOS / MC
• FAaST Near Surface Doping
• FAaST PDM
• FAaST SASS I-V
• FAaST SDI C-V
• MCV-2500 / MCV-530
• PMR-3000
• QC-2500e

SPV Diffusion Length

• FAaST SPV
• WT-2000
• WT-2500
• WT-3000

Spectroscopic Ellipsometry

• GES5E
• SE-3000

Model-based infrared technology

• IR-3100

Bulk Micro Defects

• LST-300A
• SIRM-300

Ellipsometry Porosimetry

• PS Series

SurfaceWave™

• SW-3300

JPV

• WT-2000
• WT-2500
• WT-3000

UVPCD Epi-lifetime

• WT-2000
• WT-2500
• WT-3000

VQ oxide monitoring

• WT-2000
• WT-2500
• WT-3000

µ-PCD Lifetime

• WT-2000
• WT-2000MCT
• WT-2500
• WT-3000