µ-PCD Lifetime
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Lifetime is a property of a bulk semiconductor material, telling the amout of time, on average, an excess carrier exists in a semiconductor material before recombining to achieve equilibrium. The same parameter is also called “minority carrier lifetime,” “carrier lifetime,” and “recombination lifetime.” Lifetime of a semiconductor with a perfect crystal lattice and no comtamination will be long, and any imperfections in the semiconductor material or contamination will reduce the lifetime. Thus, monitoring lifetime is an excellent method to detect contamination.
FEATURES:
- Detects
- impurities due to heavy metal contamination and transition metal contamination
- crystal defects
- iron concentration determination both in CZ and FZ wafers
- No wafer thickness limitation
- Fast measurement speed: 20 wafers/hour (4400 points)
- High lateral resolution (down to 0.5mm)
- Requires surface passivation: thermal oxide, chemical passivation or corona charging
The most common way of measuring lifetime is via a technique called microwave PCD (µ-PCD). Many Semilab products include µ-PCD measurement technology. The WT-2000 offers maps of lifetime measurements for semiconductor wafers, via a benchtop system. . The WT-2500 offers similar capability via FOUP and/or Open Casette system for up to 300mm wafers. Semilab’s WT-2000MCT measures lifetime as a function of temperature for narrow band semiconductors.
