WT-3000
Printer-friendly version
WT-3000 Double FOUP platform
The WT-3000 is a powerful standalone measurement platform for performing many different semiconductor material characterization measurements. The base system includes all the overhead functions necessary to perform characterization measurements, including power supplies, computer and operating software, R-Θ measurement stage, etc. Each system in then configured to the user’s requirements by adding treatment and measurement capabilities.
It is possible to integrate all of the following measurement techiques in one mapping instrument:
- Microwave induced photoconductive decay
- (µ-PCD) and Charge-PCD / minority carrier lifetime mapping
- Surface Photovoltage (SPV) / diffusion length mapping
- Iron (Fe) concentration mapping
- Copper (Cu) concentration measurement
- High intensity laser source for µ-PCD or SPV
- Voltage – Charge (V-Q) / oxide and interface characterization technique
- Mobile ion measurement
- Junction Photo-Voltage measurement for sheet resistance mapping
- Ion Implant Monitoring
WT-3000 TREATMENTS
- Hot chuck / desorber
- Linear corona charger and pin charger
- Optical flash
- PTC – Low Temperature RTP
WT-3000 is designed to meet SEMI standards.
Applications:
