LST-300A

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LST-300A Light Scattering Tomograph Micro- and Grown-in Defect Analyzer

LST is a powerful tool for monitoring bulk micro defect (BMD) profile of silicon samples. The BMD scatters the incident light which is recorded by a CCD camera near to the cleaved edge of the sample.

 

Highlights:

  • High speed
  • High depth resolution
  • Detectable particle size down to 12nm

Features:

  • DZ determination from one image concentration distribution along the wafer diameter within minutes
  • Depth resolution: 0.5µm
  • First particle detected within 0.5µm from the surface
  • Fully automatic operation including half wafer handling
  • Autofocusing on the cleaved surface
Applications: 

Bulk Microdefects
Additional remarks: 

Facility Requirements

  • Power requirement: max. 800 W, 100-240 V, 50/60 Hz
  • Vacuum: 0-0.3 bar, max. 1-2 l/min
  • Temperature of operation: 23°C ± 3°C; 1°C/hour
  • Cleanroom: better or equal to Class 10000
Technologies: 

Bulk Micro Defects