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Semilab offers various solutions to analyse semiconductor samples. These are all aimed to give as much information on the subject as possible, to help people understand the sources of the behavior and properties of their samples and the effects of the used processes.

 

Products: 
DLS-1000
GES5E
DLS-83D
Technologies: 

Bulk Micro Defects

Deep Level Transient Spectroscopy

Spectroscopic Ellipsometry

Epi Layer Monitoring

  • ACV-3000
  • ECV-3000
  • FAaST Near Surface Doping
  • MCV-2500 / MCV-530
  • QC-2500e
  • WT-2000
  • WT-2500
  • WT-3000

Analytical

  • DLS-1000
  • DLS-83D
  • GES5E

Contamination Monitoring

  • DLS-1000
  • DLS-83D
  • FAaST SPV
  • WT-2000
  • WT-2000MCT
  • WT-2500
  • WT-3000

Dielectric Characterization

  • ECV-3000
  • FAaST 300-SL
  • FAaST COCOS / MC
  • FAaST SASS I-V
  • FAaST SDI C-V
  • IR-3100
  • MCV-2500 / MCV-530
  • PS series
  • SE-3000
  • SW-3300
  • WT-2000
  • WT-2500
  • WT-3000

Ion Implant Monitoring

  • ECV-3000
  • FAaST PDM
  • PMR-3000
  • WT-2000
  • WT-2500
  • WT-3000

Etched Structures

  • IR-3100

Bulk Microdefects

  • LST-300A
  • SIRM-300

Metal Layer

  • SW-3300

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